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Description
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm 1179C Mass Flow Controller, Elastomer Seal, 10 - 20,000 sccm

Specifications

  • Control Range
    2% to 100% of Full Scale
  • Full Scale Flow Range
    10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
  • Fitting Type
    Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok®
  • Analog I/O Connector
    9-pin or 15-pin Type "D"
  • Seal Material
    Buna-N, Neoprene®, Kalrez®
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    10 to 40 psid (10 to 5000 sccm)
    15 to 40 psid (10000 to 30000 sccm)
    (with atmospheric pressure at the MFC outlet)
  • Typical Accuracy
    ±1.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading./°C
  • Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    2 minutes
  • Typical Settling Time
    <2 sec
  • Operating Temperature
    0° to 50°C
  • Power Requirements
    ±15 VDC (200 mA start-up, 100 mA steady-state)
  • Set Point Command Signal
    0 to 5 VDC from <20K Ω
  • Wetted Materials
    316L S.S., Viton®, nickel
  • External Leak Integrity
    < 1 x 10-9
  • Leak Integrity Through Closed Valve
    <1.0% of Full Scale at 40 psig inlet to atmosphere
  • Compliance
    CE

Features

Form-Fit-Function Replacement MFC

The 1179C is a direct form-fit-function replacement for the most common MFCs on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.

Performance and Reliability

Performance and reliability have been designed into the 1179C, and ensured through rigorous MTBF analysis and extensive STRIFE testing. The 1179C complies with IEC-801 specifications for tolerance to ESD (electro static discharge) and RFI (radio frequency interference) environments. Zero and span drift are minimal with MKS’s new patented sensor, as shown by the graph below. The 1179C also complies with European CE Mark requirements. As a statement of our confidence in the performance of the 1179C, it carries a two-year warranty.

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