The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 Mass-Flo® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.
Flow ranges from 10 sccm to 20 slm
Patented sensor design provides exceptional zero stability
Fast warm-up time minimizes expensive production downtime
Compatible with earlier MKS MFC and power supply/readout modules
10 to 40 psid (10 to 5000 sccm) 15 to 40 psid (10000 to 30000 sccm) (with atmospheric pressure at the MFC outlet)
Typical Accuracy
±1.0% of Full Scale
Repeatability
±0.2% of Full Scale
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading./°C
Pressure Coefficient
<0.02% of Reading/psi
Warm-up Time
2 minutes
Typical Settling Time
<2 sec
Operating Temperature
0° to 50°C
Power Requirements
±15 VDC (200 mA start-up, 100 mA steady-state)
Set Point Command Signal
0 to 5 VDC from <20K Ω
Wetted Materials
316L S.S., Viton®, nickel
External Leak Integrity
< 1 x 10-9
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Compliance
CE
Features
Form-Fit-Function Replacement MFC
The 1179C is a direct form-fit-function replacement for the most common MFCs on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.
Performance and Reliability
Performance and reliability have been designed into the 1179C, and ensured through rigorous MTBF analysis and extensive STRIFE testing. The 1179C complies with IEC-801 specifications for tolerance to ESD (electro static discharge) and RFI (radio frequency interference) environments. Zero and span drift are minimal with MKS’s new patented sensor, as shown by the graph below. The 1179C also complies with European CE Mark requirements. As a statement of our confidence in the performance of the 1179C, it carries a two-year warranty.
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Drawings, CAD & Specs
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