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Description
179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm 179C Mass Flow Meter, Metal Seal, 10 - 20,000 sccm

Specifications

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
  • Fitting Type
    Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
  • Analog I/O Connector
    9-pin or 15-pin Type "D"
  • Maximum Inlet Pressure
    500 psig
  • Normal Operating Pressure Differential
    10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)
  • Typical Accuracy
    ±1.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading./°C
  • Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    2 minutes
  • Operating Temperature
    0° to 50°C
  • Power Requirements
    ±15 VDC (150 mA start-up, 50 mA steady-state)
  • Wetted Materials
    316L S.S.
  • External Leak Integrity
    < 1 x 10-9
  • Compliance
    CE

Features

Direct Form-Fit-Function Replacement

The 179C is a direct form-fit-function replacement for the most common MFM’s on the market today. The standard 3-inch footprint enables the 179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 179C is compatible with mass flow controller (MFC) power supply and display electronics from MKS or other manufacturers.

Performance and Reliability

Performance and reliability have been designed into the 179C, and ensured through rigorous MTBF analysis and extensive STRIFE testing, which includes humidity soak and temperature cycling. The 179C MFM also complies with European CE Mark requirements. Zero and span drift are minimal with MKS’ new patented sensor, as shown by the graph below. As a statement of our confidence in the performance of the 179C, it carries a two-year warranty

Resources

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