Configuration Options

 Show All Configuration Options
Description
vacuum gauge without display 972B Cold Cathode Vacuum Transducer, DualMag, Series 972B

Specifications

  • Absolute Measurement Range
    1 x 10-8 Torr to Atmosphere
  • Digital Communication
    RS485, RS232 or EtherCAT
  • Type
    Vacuum Transducer
  • Sensor
    Cold Cathode - MicroPirani™
  • Relays
    3 relays, SPST
  • Installation Orientation
    Any
  • Set Point Range
    1 x 10-8 Torr to Atmosphere
  • Calibration Gas
    Nitrogen
  • Operating Temperature
    0-40°C (32-104°F)
  • Maximum Bakeout Temperature
    85°C (185°F), non-operating
  • Digital Controls
    Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
  • Digital Status
    Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
  • Analog Output
    0.5 VDC per decade
  • Relay Contact Rating
    1 A @ 30VAC/DC, resistive
  • Power Requirements
    9-30 VDC, 2 W
  • Accuracy
    5 x 10-8 Torr to 10-3 ± 30% of reading
    10-3 to 100 ±5% of reading
  • Repeatability
    5 x 10-8 Torr to 10-3 ± 30% of reading
    10-3 to 100 ±2% of reading
  • Overpressure Limit
    1500 Torr
  • Internal Volume
    21 cc
  • Exposed Materials
    304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic
  • Electronic Casing and Flange
    304 stainless steel
  • Weight
    12.7 oz (360 g)
  • Compliance
    CE
  • Connectors
    RS232 or RS485: 15-pin D-subminiature male
    EtherCAT: One 15-pin D-subminiature male, Two RJ45 female

Features

Digital Communications

Series 970B vacuum transducers feature RS232, RS485, and EtherCAT (972B only) digital communications interface for setup of transducer parameters and to provide real time pressure measurement. The digital interface can be used to control pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, and gas type.

0.5 VDC per Decade Analog Output

All Series 970B transducers have an analog pressure output of 0.5 VDC per decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. It can emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.

Optional Integrated Touch-screen Display

The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.

Process Control Relays

The Series 970B has up to three mechanical SPST relays which can be used for process control, examples are interlocking valves or pumps. Relay contacts are rated at 1 amp for 30 VAC or VDC, resistive loads.

Applications

Sensor and transducer measurement ranges. From top to bottom: 971B, 972B, and 974B

The Series 970B Transducers are compact, low cost measurement solutions for vacuum users operating within the pressure range of atmosphere to 10-8 Torr. The small size of the Series 970B transducers makes them ideal for system integrators looking to reduce footprint and enable miniaturization.

Applications include:

  • Analytical equipment (mass spectrometer control)
  • Scanning electron microscopes
  • Coating systems
  • Semiconductor loadlock pressure control
  • General vacuum base pressure measurement

Resources

Need help?

Contact an Applications Specialist by sending us an email
CompareDescriptionDrawings, CAD & Specs AvailabilityPrice
mgctlbxN$MZP mgctlbxV$5.3.2 mgctlbxL$C