The 972B DualMag™ vacuum transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and it combines cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure while offering 1-2 decades lower measuring range than a traditional pirani gauge. By lowering the cold cathode activation pressure gauge, reliability is improved and the service interval extended.
Absolute measurement from 10-8 Torr to atmosphere
Cold cathode anode module design is user serviceable to decrease downtime
RS232, RS485 or EtherCAT®/Analog communications
MEMS based MicroPirani sensor for low auto cold cathode turn-on pressure
MicroPirani is automatically zeroed during pump down cycle for improved accuracy
Small footprint design provides a compact transducer solution
Additional CAD file downloads are not available for this product.
972b-dualmag-cold-cathode-transducer - Drawings
Additional drawings are not available for this product.
Specifications
Absolute Measurement Range
1 x 10-8 Torr to Atmosphere
Digital Communication
RS485, RS232 or EtherCAT
Type
Vacuum Transducer
Sensor
Cold Cathode - MicroPirani™
Relays
3 relays, SPST
Installation Orientation
Any
Set Point Range
1 x 10-8 Torr to Atmosphere
Calibration Gas
Nitrogen
Operating Temperature
0-40°C (32-104°F)
Maximum Bakeout Temperature
85°C (185°F), non-operating
Digital Controls
Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
Digital Status
Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
Analog Output
0.5 VDC per decade
Relay Contact Rating
1 A @ 30VAC/DC, resistive
Power Requirements
9-30 VDC, 2 W
Accuracy
5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 100 ±5% of reading
Repeatability
5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 100 ±2% of reading
RS232 or RS485: 15-pin D-subminiature male EtherCAT: One 15-pin D-subminiature male, Two RJ45 female
Features
Digital Communications
Series 970B vacuum transducers feature RS232, RS485, and EtherCAT (972B only) digital communications interface for setup of transducer parameters and to provide real time pressure measurement. The digital interface can be used to control pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, and gas type.
0.5 VDC per Decade Analog Output
All Series 970B transducers have an analog pressure output of 0.5 VDC per decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. It can emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.
Optional Integrated Touch-screen Display
The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
Process Control Relays
The Series 970B has up to three mechanical SPST relays which can be used for process control, examples are interlocking valves or pumps. Relay contacts are rated at 1 amp for 30 VAC or VDC, resistive loads.
Applications
Sensor and transducer measurement ranges. From top to bottom: 971B, 972B, and 974B
The Series 970B Transducers are compact, low cost measurement solutions for vacuum users operating within the pressure range of atmosphere to 10-8 Torr. The small size of the Series 970B transducers makes them ideal for system integrators looking to reduce footprint and enable miniaturization.
Applications include:
Analytical equipment (mass spectrometer control)
Scanning electron microscopes
Coating systems
Semiconductor loadlock pressure control
General vacuum base pressure measurement
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