The 100003876 Viton Seal Set is designed for use with Series 150 or 160 pneumatic vacuum valves with a size NW100 port.
100003876 is compatible with these MKS valves:
154-0100C | 154-0100P | 154-0100T | 154-1100C |
154-1100P | 154-1100T | 155-0100C-120V/50-60 | 155-0100C-24V/50-60 |
155-0100C-24VDC | 155-0100P-120V/50-60 | 155-0100P-220V/50-60 | 155-0100P-24V/50-60 |
155-0100P-24VDC | 155-0100T-120V/50-60 | 155-0100T-24V/50-60 | 155-0100T-24VDC |
155-1100C-120V/50-60 | 155-1100C-24V/50-60 | 155-1100C-24VDC | 155-1100P-120V/50-60 |
155-1100P-220V/50-60 | 155-1100P-24V/50-60 | 155-1100P-24VDC | 155-1100T-120V/50-60 |
155-1100T-24V/50-60 | 155-1100T-24VDC |