AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator
Overview
The AX8410 PRIME is part of MKS’ next generation platform of compact, high concentration, ultra high flow, ultra clean ozone generators. It uses a patented cell and power structure to achieve twice the ozone output of earlier models while maintaining a similar footprint.
The AX8410 PRIME converts oxygen to ozone through silent electrical discharge. Its novel patented cell design supports new process requirements requiring higher ozone concentrations at flow rates up to 80 slm. The increased flow rate and higher concentration position the AX8410 PRIME generator to meet the ozone requirements for the next generation of semiconductor processes.
- Ozone concentration up to 375 g/Nm3 or 24.2 wt% at 5°C
- O2 flow rate from 5 slm to 80 slm enables process flexibility
- Patented cell structure design improves gap uniformity to enable production of high concentration ozone
- High ozone output enables innovative system design opportunities
- Closed-loop operation for tighter process control
- Multi-parameter touch screen interface for smart front panel operation and control
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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AX8410 Ozone Gas Generator, 5 - 80 slm, Ultra Clean, Ultra High Concentration |
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Specifications
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TypeOzone Gas Generator
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Ozone Outputup to 335 g/Nm3
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Flow Rate5 - 80 slm
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Feed GasOxygen: Grade 6 or better O2, Nitrogen: 100 - 1000 ppm Grade 5 or better N2
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Nominal Cell Pressure (Delivery)15 - 45 psig (100 - 310 kPa)
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Pressure20 - 50 psig
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Control InterfaceFront panel control and remote operation
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Cooling Water Temperature5 - 25°C (41 - 77°F)
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Cooling Water Filtration100 microns
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Cooling Water QualityResistivity ≥50 KΩ/cm
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Minimum Water Flow22.7 lpm (6.0 gpm)
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Voltage Requirements208 VAC (±10%)
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Phase3Ø & Ground, no Neutral
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Current Requirements50 Amps
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Frequency50/60 Hz
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Weight77 kg (170 lb)
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Dimensions483 x 521 x 267 mm (19.0 x 20.5 x 10.5 in) (width x depth x height)
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ComplianceCE, UL/CSA, and SEMI F47
Features
Performance Chart — Typical Ozone Output
Resources
Literature
- AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator (410.5 kB, PDF)
Drawings & CADs
- AX8410 Ozone Generator Dimensional Drawing (224.4 kB, PDF)
Application Notes
- AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator (239 kB, PDF)
- Ozone Data Conversion Tables (289.1 kB, PDF)
- Ozone Applications in Atomic Layer Processing (1.7 MB, PDF)
Technical Papers
- Ozone Applications for Atomic Layer Processing (1.5 MB, PDF)
Ultra-High Velocity 