Specifications

  • Type
    Ozone Gas Delivery System
  • Ozone Output
    350g/Nm3
  • Flow Rate
    40 slm
  • Feed Gas
    Oxygen, Nitrogen (20 - 100 ppm of total flow)
  • Feed Gas Supply Pressure
    50 psig (3.5 kg/cm2) nominal, 60 psig (4.2 kg/cm2) maximum, N2 pressure 10 psi higher than O2 pressure
  • Feed Gas Purity
    99.9995% minimum
  • Operating Temperature
    41 - 104°F (5 - 40°C)
  • Cooling Water Temperature Required
    12 - 21°C with chiller, 5 - 17°C without chiller
  • Cooling Water Filtration Required
    100 micron Filtration PWC (with chiller)
  • Cooling Water Quality Required
    1 - 3 MOhm DI, Note: Max DI water/Glycol blend: 70/30
  • Cooling Water Minimum Flow Required
    10 gpm nominal (water modulating valve range: 2 - 10 gpm) with chiller, 2.5 gpm per Generator (configuration dependant) without chiller
  • Cooling Water Connections Required
    1 in. compression (Swagelok®)
  • Cooling Water Heat Load Required
    10 kw (based on two generator configuration) with chiller, 5 kw per generator without chiller
  • Voltage Requirements
    208 volts AC (±10%), three phase
  • Current Requirements
    31 Amps RMS, 50 Amps service (depending on configuration) minimum of 10,000 A.I.C, 60 Amps service with chiller
  • Frequency
    50/60 Hz
  • Exhaust Flow Rate
    150 cfm (70.8 l/s)
  • Exhaust Type
    SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
    0.10 in. (2.54 mm) H2O minimum, measured at the bottom of the duct flange adapter on cabinet
  • Control Air Pressure
    70 - 100 psig
  • Control Air Type
    CDA or dry nitrogen, 40µm filtered
  • Control Air Fitting
    1/4 in. compression (Swagelok®)
  • Exhaust Connection
    6 in. diameter duct opening or 4 in. diameter duct opening
  • Dimensions
    24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)
  • Relative Humidity
    30 - 90% (non - condensing)
  • Weight
    600 lbs.(272 kg) for system with one generator, 880 lbs.(400 kg) for system with four generators, 1100 lbs. (499 kg) for system with two generators and internal chiller
  • Compliance
    CE, S2 - 0302, F47
  • Altitude
    Up to 3280 feet (1000 m) above mean sea level

Features

Environmentally Friendly Solution

Ozone has many advantages over other oxidizers as a strong oxidizing agent. Ozone has a high redox potential, can be generated at the point-of-use, and it decays naturally into oxygen (2O3 ⇒ 3O2). Therefore, it is considered a "green" chemical. If required, ozone can also be destroyed at the output of the process chamber using a catalytic or thermal destruct unit. This significantly lowers the chemical disposal cost, as the output is oxygen and contains no ozone. Ozone is very stable at room temperature, making it a good choice for most applications. Typical ozone applications include ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.

Multi-channel Capability

The AX8575 system is configurable with up to four (4) independent channels to support multiple tools or chambers concurrently. Each channel can be matched to the specific concentration and flow required for your specific process. For ultra high concentration processes the system can be configured for up to two (2) channels with an in-rack chiller thereby maintaining the same footprint. The ozone source for each channel is the production-proven AX8407 series ozone generators. It incorporates MKS patented, field proven, high concentration, ultra clean ozone generation technology. The AX8575 includes all subassemblies required for stand-alone operation, including power distribution, an ambient ozone safety monitor and status indicator panel.
AX8575 Multi Generator In-rack Chiller Performance

AX8575 Non-Chiller System Performance

Resources

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