Rapid Vacuum Isolation Valves offer extremely fast closing speeds to protect the vacuum system during a backpressure event caused by pump failure. Many valves do not close fast enough to prevent particles and turbulence from moving upstream and damaging the process.
NW16 - NW160
Protects vacuum system from particles and turbulence during pump failure
<50 to 600 msec closing time (depending on configuration)
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rapid-isolation-valves - Drawings
Additional drawings are not available for this product.
Specifications
Type
High Speed, Fast Closing Vacuum Valve
Port Size
Various, NW16 to NW160
Closing Time
<50 to 600 msec, depending on configuration
Features
Applications
In most applications, there are two isolation valves in the vacuum foreline; one near the chamber exit for process isolation and one directly upstream of the pump for preventative maintenance work.
The Rapid Isolation Valve can be triggered a number of ways, including:
Power to the pump - many pumps have accessory relays which can be easily tapped.
Programmable Automation Controller (PAC) or equivalent device providing logic.
Pressure Sensors, based either on a threshold pressure or a rate-of-rise.
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