The Process Sense™ endpoint detector is a small, low-cost SiF4 sensor specifically designed for Remote Plasma Chamber Clean Endpoint detection for silicon-based CVD deposition chambers. Process Sense is based on infrared absorption, the only technique applicable to all plasma cleaning processes (in-situ and remote).
The Process Sense detector gets mounted onto a bypass on the rough line, ensuring no effect on deposition hardware. The signal level reported by the Process Sense detector, which is proportional to SiF4 concentration, can be used to determine the completion of the chamber clean process.
Sensitivity to SiF4 down to 1 ppm
Simple analog output for reported concentration signal
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