The πPC is available with a Full Scale pressure from as low as 1000 torr up to 100 psia. πPC is available in either an upstream or downstream pressure control configuration making it well suited for controlling process chamber backpressure or process gas delivery pressure.
Specifications
Type
πPC PC90 Absolute Pressure Controller
Pressure Range
1000 Torr, 2000 Torr, 100 Psia Full Scale
Fitting Type
Swagelok 4 VCR Male, 1-1/8” surface mount (C-seal, W-seal)
Two open collector transistors, adjustable from 0 to 100% of Full Scale Rated Current: 30VDC / 250mA State: On, above, or below trip point Hysteresis: 3% of Full Scale (factory set) Status: LEDs Red when the transistor is on
Pressure Readout Units
(For all Torr Full Scale ranges) Torr, kPa; (For Psi Full Scale Range) Psi, kPa
Pressure Resolution
0.1 Torr for 0 to 100 Torr, 1 Torr for >100 Torr, 0.1 Psi for 0 to 100 Psi
Pressure Control Accuracy
± 0.2% of Full Scale (< 10% Full Scale); ± 1.0% of Reading (≥ 10% Full Scale)
Transducer Over Pressure Limit
2x Full Scale for all ranges
Maximum Differential Pressure
45 Psid
Burst Pressure
1500 Psig
Control Mode
Upstream or Downstream
Pressure Measurement Accuracy
± 1.0% of Reading
Zero Temperature Coefficient
± 0.02% of Full Scale /°C
Span Temperature Coefficient
± 0.04% of Reading /°C
Control Range
> 2 to 100% of Full Scale
Typical Response Time
< 1.0 second
Operating Temperature
10° to 50°C (50° to 122°F)
Storage Temperature
-20° to 80°C (-4° to 176°F)
Storage Humidity
0 to 95% Relative Humidity, non-condensing
External Leak Integrity
< 1 x 10-10
Leak Integrity Through Closed Valve
< 1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
Wetted Materials
Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, Inconel® 718, 825 Incoloy® Optional: (Valve Seat) PTFE (Teflon) or Sapphire (Metal)
Surface Finish
5 µinches, average Ra
Input Power
+15 to +24 VDC @ 350mA max
Connector
15-pin Type “D” Male
Set Point
0 to 10 VDC (Default), 0 to 5 VDC (User Switchable)
Analog Output Minimum Impedance
< 1 Ω
Power Required
DeviceNet: +11 to +25 VDC per DeviceNet specification (@ <3.5 watts) RS-485: +15 to +24 VDC @ 350mA max
Connector-Interface
DeviceNet: 5 pin microconnector (DeviceNet) RS-485: 9 pin Type D male
Data Rate Switch
DeviceNet: 4 positions: 125, 250, 500K (Default), PGM (programmable over the network) RS-485: 3 positions: 9.6, 19.2, 38.4K (Default)
DeviceNet Communication Rate
125 Kbps, 250 Kbps, 500 Kbps (user selectable)
RS485CommunicationRate
9.6 Kbps, 19.2 Kbps, 38.4 Kbps (user selectable)
MAC ID Switches
DeviceNet: 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers; (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3) RS-485: 2 switches, 10 positions; 0,0 to 9,9. Available MAC ID’s are 3,2 to 9,9.
Network Topology
DeviceNet: Linear (trunkline/dropline) power and signal on same network cable RS-485: Master/slave
Network Size
DeviceNet: Up to 64 nodes RS-485: Up to 32 nodes
Indicators
DeviceNet: LED network status (green/red) LED module status (green/red), Scrolling LED displays (piPC Type, Pressure Full Scale, IP address) Push-Button Display toggles between (Pressure in TORR & KPA or PSI & KPA, Temperature and Scrolling display) RS-485: LED network status (green/red) LED module status (green/red)
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