High Power Microwave Plasma System
Overview
- High power microwave plasma system @ 2.45 GHz
- Advanced closed loop power control with <1% output accuracy variation
- Instant plasma ignition
- Auto tune system within <1.5 seconds
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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HMPX60Q-MKS Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Quartz |
6 Weeks
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HMPX60S-MKS Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Sapphire |
6 Weeks
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Showing 1 to 2 of 2 entries
Specifications
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Maximum Plasma Power Output6.0 kW
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Frequency2,440-2,470 MHz
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Ripple2,440-2,470 MHz
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Output Accuracy<1% closed loop control
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Ambient TemperatureUp to 40°C max
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Generator to Head DistanceUp to 100 feet max
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Microwave ConnectionsWR284F waveguide with CPR284F flanges
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Power Requirements200-208 VAC, 3 phase, 50/60 Hz
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Autotune<1.5 seconds with <2% reflected power
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ChemistriesO2, N2H2, N2, H2O, NH3, H2
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Applicator MaterialQuartz or Sapphire
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Gas Flow Range1 - 10 slm
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Operating Pressure1 - 10 Torr
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CommunicationsAnalog, RS485
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ComplianceCE
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ConfigurationKF40, custom
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CoolingWater: 1 GPM, 20-30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
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Power Supply Generator Dimensions(7U rack) 19 H x 12.2 W x 20.03 D in. (482.6 x 309.88 x 508.76 mm)
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Power Head Magnetron Head Dimensions9.85 H x 9.85 W x 16 D in. (250.19 x 250.19 x 406.4 mm)
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Power Head Magnetron Head CoolingWater: 1 GPM, 20-30°C, 71 PSI max
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RegulationBetter than 1% of output power (line and load)
Resources
Drawings & CADs
- High Power Microwave Plasma System Dimensional Drawing (792.8 kB, PDF)
Literature
- High Power Microwave Plasma System (556.5 kB, PDF)
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