The 651C Self-tuning/Digital PID Valve Controller drives MKS 653 or 253 Exhaust Throttle Valves with speed and precision. Its self-tuning algorithm brings the system to set point faster than conventional controllers, and ensures repeatable process recipes without operator involvement. The self-tuning function determines optimal control parameters for any set point in the range of the valve by learning time constants, transfer functions of the valve and plumbing, valve gain, and other important parameters.
Specifications
Type
651C Digital/Analog Pressure Controller
For Use With
653 or 253 Exhaust Throttle Valves
Power Input
90-132 or 180-264 VAC, 50/60 Hz
Power Output
Standard: ±15 VDC ±5 @ 0.5 Amp (Derated to 0.4 Amp with 90-99 or 180-198 VAC input) when powered Optional: ±15 VDC ±5% @ 1.5 Amps max.
Pressure Control Signal
0-10 VDC, 0-5 VDC, or 0-1 VDC, user selectable
Output Signal
Analog, "0-5 or 0-10 VDC for 0-100% valve position and 0-10 VDC for 0-100% Full Scale pressure.
Set Points
Programmable: 5 total, programmable in any combination for pressure or position (adjustable from the front panel or RS-232; selectable from the front panel, TTL, or RS-232) External Analog: 1; pressure or position, 0-5 or 0-10 VDC
Relay Output
2, process limits: 24 Volts VDC @ 1 Amp resistive
Repeatability
±0.1% of Full Scale
Operating Temperature
15 - 40°C (60 - 104°F)
Display
2-line LCD with 4-1/2 place readout (pressure and valve position)
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