Specifications

  • Sensor Type
    Micro-Ion® Gauge
  • Measurement Range
    1 x 10-9 Torr to atmosphere
    1 x 10-9 mbar to atmosphere
    1 x 10-7 Pa to atmosphere
    (Air and N2)
  • Repeatability
    <5% of reading from 1 x 10-8 Torr to 50 Torr
  • Accuracy
    <15% of reading from 1 x 10-8 Torr to 50 Torr (N2)
  • Filament
    Yttria-coated iridium
  • Operating Temperature
    10 - 40°C
  • Bake Out Temperature
    150°C (with electronics removed)
  • Storage Temperature
    -40 to 70°C
  • Relays
    Two single-pole, double-throw relays (SPDT)
  • Relay Contact Rating
    1 A at 30 VDC resistive, non-inductive
  • Relay Response
    1 x 10-9 to 50 Torr; 1 x 10-9 to 70 mbar; 1 x 10-7 Pa to 7 kPa
  • Power Requirements
    24 VDC ±15%, 26 W max
  • Exposed Materials
    304 stainless steel, tantalum, tungsten, nickel, nickel iron alloy, borosilicate glass
  • Case Material
    Aluminum extrusion
  • Internal Volume
    10.8 cc
  • Weight
    567 gm (20 oz) with NW16KF flange
  • Display
    2 digits plus exponent, green LED (optional)
  • Ion Gauge Degas
    Electron bombardment, 3.75 W with 2-minute timer
  • Ion Gauge Emission Current
    Autoranging
  • Ion Gauge Auto On Setting
    2 x 10-2 Torr; 3 x 10-2 mbar; 3 Pa, on decreasing pressure
  • Ion Gauge Auto Off Setting
    3 x 10-2 Torr; 4 x 10-2 mbar; 4 Pa, on increasing pressure
  • Switch to Low Emission Setting
    1 x 10-5 Torr; 1 x 10-5 mbar; 1 x 10-3 Pa, on increasing pressure
  • X-ray Limit
    <3 x 10-10 Torr; <4 x 10-10 mbar; <4 x10-8 Pa
  • Compliance
    CE

Features

The combination of two sensors in the same vacuum envelope saves space. Vacuum system control is simplified by using the heat-loss sensor to automatically turn-on and turn-off the ionization gauge. The patented Conductron Heat Loss Sensor is based on the understanding and insights gained in over 35 years of experience in making the industry standard Convectron® Gauge. The wide range, high performance and compact size make the Micro-Ion Plus Module a wise choice for pressure measurement on high vacuum systems.

Micro-Ion® Plus Gauge

  • Compact Combination Gauge: Micro-Ion Plus combines the new miniature Conductron Heat-loss sensor with a Micro-Ion sensor in one gauge envelope, at less than 10% of the volume of a conventional ionization gauge.
  • High Performance: The complete Micro-Ion design has been retained with the patented dual ion collector that increases the electron path length and ion collection efficiency, providing high performance in a small volume.
  • Dual Ionization Sensor Filaments: Dual, burn-out resistant yttria-coated iridium filaments provide long gauge life. Unscheduled downtime is avoided by using the second filament as a back-up until the gauge can be replaced during regular maintenance procedures.
  • Cooler Operation: At only 8% of the power consumption of a traditional glass or nude gauge, the Micro-Ion sensor generates much less heat to disturb a process or experiment.
  • Robust All-Metal Design: Welded components, vacuum fired and assembled in a cleanroom environment, are enclosed in a stainless steel envelope to ensure sensor integrity.
  • Port Shield: Protects the electrode assembly from damage during assembly or vacuum chamber maintenance, and provides a stable electrical environment for improved measurement performance.
  • Wide Selection of Vacuum Fittings: Simplifies installation on your vacuum system.
  • Replaceable Gauge: Gauge can quickly and easily be replaced using only a screwdriver.

Micro-Ion® Plus Module

  • Wide Measurement Range: Allows vacuum system performance to be monitored continuously from 1x10-9 Torr (1x10-9 mbar; 1x10-7 Pa) to atmosphere.
  • Simple Modular Design: Electronics and sensors are packaged together in one compact, easy to install module that eliminates the need for multiple gauges, cables, and electronics.
  • Control System Simplification: The integral heat loss sensor automatically controls activation and deactivation of the ion gauge, eliminating the need for external control of the ion gauge.
  • RS-485, Analog Output and Remote I/O: In addition to RS-485 communications and analog output, the module provides input control of gauge on/off, degas, atmospheric calibration, and keyboard lock along with outputs of gauge, filament, and degas status.
  • Process Trip Points: Relay contacts allow control of other vacuum equipment and provide safety interlocking. Settings are adjustable through the local display interface, RS-485 or DeviceNet interface.
  • Local Display/Interface (Optional): Setup time and diagnostics are improved with a green LED display and pushbutton interface that gives point-of-use pressure indication and local adjustment of process trip points.
  • DeviceNet Interface Version: Provides high speed access to pressure measurement and easy configuration of gauge parameters.
  • DeviceNet Network Power Flexibility: Gauge power can be supplied either through the DeviceNet micro connector or through a separate connector.

Resources

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